Share Email Print
cover

Proceedings Paper

Analysis of grating inscribed micro-cantilever for high resolution AFM probe
Author(s): N. Balajee; D. Roy Mahapatra; G. M. Hegde
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We present a mathematical modelling and analysis of reflection grating etched Si AFM cantilever deflections under different loading conditions. A simple analysis of the effect of grating structures on cantilever deflection is carried out with emphasis on optimizing the beam and gratings such that maximum amount of diffracted light remains within the detector area.

Paper Details

Date Published: 22 June 2013
PDF: 5 pages
Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87690Z (22 June 2013); doi: 10.1117/12.2020330
Show Author Affiliations
N. Balajee, Indian Institute of Science (India)
D. Roy Mahapatra, Indian Institute of Science (India)
G. M. Hegde, Indian Institute of Science (India)


Published in SPIE Proceedings Vol. 8769:
International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013)
Chenggen Quan; Kemao Qian; Anand Asundi, Editor(s)

© SPIE. Terms of Use
Back to Top