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Proceedings Paper

EFPI signal processing method providing picometer-level resolution in cavity length measurement
Author(s): Nikolai Ushakov; Leonid Liokumovich; Andrey Medvedev
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Paper Abstract

In the current article an advanced method of EFPI baseline measurement by use of spectral function approximation is proposed. The method provides an increase in EFPI baseline measurement precision and computational acceleration. The method bases on two foundations provided by analysis of low-finesse Fabry-Perot interferometer model: reduction of search domain and taking into account the most informative spectral intervals, providing a greater impact on the residual of measured and theoretical EFPI spectral functions. Proposed signal processing method resulted in the EFPI baseline measurement resolution less than 50 pm for the cavity length values between 20 and 700 μm.

Paper Details

Date Published: 13 May 2013
PDF: 13 pages
Proc. SPIE 8789, Modeling Aspects in Optical Metrology IV, 87890Y (13 May 2013); doi: 10.1117/12.2020255
Show Author Affiliations
Nikolai Ushakov, St. Petersburg State Polytechnical Univ. (Russian Federation)
Leonid Liokumovich, St. Petersburg State Polytechnical Univ. (Russian Federation)
Andrey Medvedev, St. Petersburg State Polytechnical Univ. (Russian Federation)


Published in SPIE Proceedings Vol. 8789:
Modeling Aspects in Optical Metrology IV
Bernd Bodermann; Karsten Frenner; Richard M. Silver, Editor(s)

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