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Proceedings Paper

Microcircuit lithography using holographic imaging
Author(s): Ray T. Chen; Tin M. Aye; Lev S. Sadovnik; David G. Pelka; Tomasz P. Jannson
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Paper Details

Date Published: 1 June 1990
PDF: 7 pages
Proc. SPIE 1264, Optical/Laser Microlithography III, (1 June 1990); doi: 10.1117/12.20199
Show Author Affiliations
Ray T. Chen, Physical Optics Corp. (United States)
Tin M. Aye, Physical Optics Corp. (United States)
Lev S. Sadovnik, Physical Optics Corp. (United States)
David G. Pelka, Physical Optics Corp. (United States)
Tomasz P. Jannson, Physical Optics Corp. (United States)


Published in SPIE Proceedings Vol. 1264:
Optical/Laser Microlithography III
Victor Pol, Editor(s)

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