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Proceedings Paper

Dot distribution type of grayscale mask and colorscale photomask for fabrication diffractive and refractive microlens arrays
Author(s): Qingle Tang
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Paper Abstract

The fundamental relations of the ultraviolet (UV) light transmittance of the soft polymer film filled by a large number of basic micro-pattern-structures composed of micro-squares, are acquired experimentally. The polymer films with different distribution density of basic color-micro-pattern-structure in the visible range, are also constructed easily, so as to perform single photomask photolithography for fabrication microlenses with very fine surface profile. The patterned polymer films demonstrate a modulated UV-light penetrating property. Models for describing the penetrating behaviors of UV-light over polymer films covered by a large number of basic grayscale or colorscale micro-pattern structures constructed, for instance, typical micro-square and other micro-pattern-structures shaped by partially overlapping several micro-squares, are set up. Several key factors, which influence the penetrating behavior of UV-light, and then the surface character, and also the quality of correspondent functioned micro-structures in photoresist and further substrate, such as diffractive or refractive microlens, are discussed carefully. The UV-light transmitting measurements demonstrate a desired UV-light intensity variance trend, which is basically consistent with theoretical prediction.

Paper Details

Date Published:
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Proc. SPIE 8767, Integrated Photonics: Materials, Devices, and Applications II, 876711; doi: 10.1117/12.2019779
Show Author Affiliations
Qingle Tang, Huazhong Institute of Electro-Optics (China)


Published in SPIE Proceedings Vol. 8767:
Integrated Photonics: Materials, Devices, and Applications II
Jean-Marc Fédéli; Laurent Vivien; Meint K. Smit, Editor(s)

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