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Proceedings Paper

On-chip sensing with high-Q amorphous silicon microdisk resonators
Author(s): T. Lipka; J. Amthor; J. Müller
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Paper Abstract

In this paper we present a low-loss hydrogenated amorphous silicon microdisk resonator which is employed for evanescent field refractive index sensing. The resonances of the whispering gallery modes have extinction ratios of <25dB and Q-factors up to 15000 when covered with aqueous solutions. The sensitivity of the microdisk sensor was experimentally determined to be 460nm/RIU for the qTM-mode with different concentrations of NaCl dispersed in deionized water. From the measurements the resonators intrinsic limit of detection was calculated to be LOD=3.3x10-4 and the minimum detectable amount of NaCl diluted in DI-water was determined to be 0.0375%. The early results prove that photonic microdisk resonators that are fabricated with low-loss hydrogenated amorphous silicon material can be applied in a variety of different areas for label-free lab-on-chip sensing, including chemical, medical and bio-sensing applications.

Paper Details

Date Published: 20 May 2013
PDF: 7 pages
Proc. SPIE 8879, Nano-Bio Sensing, Imaging, and Spectroscopy, 88790A (20 May 2013); doi: 10.1117/12.2019502
Show Author Affiliations
T. Lipka, Hamburg Univ. of Technology (Germany)
J. Amthor, Hamburg Univ. of Technology (Germany)
J. Müller, Hamburg Univ. of Technology (Germany)

Published in SPIE Proceedings Vol. 8879:
Nano-Bio Sensing, Imaging, and Spectroscopy
Shin Won Kang; Seung-Han Park; Luke P. Lee; Ki-Bong Song; Yo Han Choi, Editor(s)

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