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Proceedings Paper

Surface form metrology of micro-optics
Author(s): Bin Xu; Zhigang Jia; Xinghui Li; Yuan-Liu Chen; Yuki Shimizu; So Ito; Wei Gao
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Paper Abstract

This keynote starts from an overview of micro-optics from fundamental functions, fabrication methods and applications in precision engineering and nanotechnology. State-of-the-art measuring systems for surface form metrology of microoptics with micro-structured surfaces, including diffractive micro-optics such as diffraction gratings and refractive micro-optics such as micro lenses and micro-lens arrays, are then be presented. The measuring systems introduced in the presentation are classified into scanning probe microscope-based systems, mechanical stylus profiling systems and optical evaluation systems. Related research activities carried out in the authors' group are also highlighted.

Paper Details

Date Published: 22 June 2013
PDF: 15 pages
Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 876902 (22 June 2013); doi: 10.1117/12.2019243
Show Author Affiliations
Bin Xu, Tohoku Univ. (Japan)
Zhigang Jia, Tohoku Univ. (Japan)
Xinghui Li, Tohoku Univ. (Japan)
Yuan-Liu Chen, Tohoku Univ. (Japan)
Zhejiang Univ. (China)
Yuki Shimizu, Tohoku Univ. (Japan)
So Ito, Tohoku Univ. (Japan)
Wei Gao, Tohoku Univ. (Japan)


Published in SPIE Proceedings Vol. 8769:
International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013)
Chenggen Quan; Kemao Qian; Anand Asundi, Editor(s)

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