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Proceedings Paper

CCD evaluation for estimating measurement precision in lateral shearing interferometry
Author(s): Bingcai Liu; Bing Li; Ailing Tian; Baopeng Li
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Paper Abstract

Because of larger measurement ability of wave-front deviation and no need of reference plat, the lateral shearing interferometry based on four step phase shifting has been widely used for wave-front measurement. After installation shearing interferograms are captured by CCD camera, and the actual phase data of wave-front can be calculated by four step phase shift algorithm and phase unwrapping. In this processing, the pixel resolution and gray scale of CCD camera is the vital factor for the measurement precision. In this paper, Based on the structure of lateral shearing surface interferometer with phase shifting, pixel resolution more or less for measurement precision is discussed. Also, the gray scale is 8 bit, 12 bit or 16 bit for measurement precision is illustrated by simulation.

Paper Details

Date Published: 22 June 2013
PDF: 6 pages
Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87691R (22 June 2013); doi: 10.1117/12.2019073
Show Author Affiliations
Bingcai Liu, Xi'an Jiaotong Univ. (China)
Xi’an Technological Univ. (China)
Bing Li, Xi'an Jiaotong Univ. (China)
Ailing Tian, Xi'an Technological Univ. (China)
Baopeng Li, Xi'an Jiaotong Univ. (China)

Published in SPIE Proceedings Vol. 8769:
International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013)
Chenggen Quan; Kemao Qian; Anand Asundi, Editor(s)

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