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Proceedings Paper

Ultra-precision diamond milling of aspheric microlens array
Author(s): Chun-Chieh Chen; Chien-Yao Huang; Yuan-Chieh Cheng; Wei-Yao Hsu
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Paper Abstract

The applications of AMLA (aspheric micro lens array) have been frequently required in opto-electro industries, such as optical communication, contact image sensor (CIS) module of scanner, wafer level optics, etc. In addition to the typical requirements of aspheric lens, for instance form accuracy and surface roughness, the pitch error of each micro lens has been highly required. Three ultra-precision freeform machining methods have been widely applied for the manufacturing of AMLA, namely fast tool servo, slow tool servo and diamond milling. UPDM (Ultra-precision diamond milling) have the advantage with no tool interference problem in comparison with tool servo machining techniques. In this paper, the tool setting error compensation method and the tool path of UPDM has been developed for the fabrication of a 5 by 5 AMLA model. The form accuracy and surface roughness of each lenses of the AMLA was less than 0.2μm and 5nm, respectively. And the pitch error of each micro lens was less than 2μm in 25 micro lenses.

Paper Details

Date Published: 22 June 2013
PDF: 9 pages
Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87693Q (22 June 2013); doi: 10.1117/12.2019064
Show Author Affiliations
Chun-Chieh Chen, Instrument Technology Research Ctr. (Taiwan)
Chien-Yao Huang, Instrument Technology Research Ctr. (Taiwan)
Yuan-Chieh Cheng, Instrument Technology Research Ctr. (Taiwan)
Wei-Yao Hsu, Instrument Technology Research Ctr. (Taiwan)

Published in SPIE Proceedings Vol. 8769:
International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013)
Chenggen Quan; Kemao Qian; Anand Asundi, Editor(s)

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