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Proceedings Paper

Heterodyne holographic nanometer alignment for a half-micron wafer stepper
Author(s): Kazuhiro Yamashita; Noboru Nomura; Keiji Kubo; Yuichirou Yamada; Masaki Suzuki
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Paper Details

Date Published: 1 June 1990
PDF: 8 pages
Proc. SPIE 1264, Optical/Laser Microlithography III, (1 June 1990); doi: 10.1117/12.20190
Show Author Affiliations
Kazuhiro Yamashita, Matsushita Electric Industrial Co., Ltd. (Japan)
Noboru Nomura, Matsushita Electric Industrial Co., Ltd. (Japan)
Keiji Kubo, Matsushita Electric Industrial Co., Ltd. (Japan)
Yuichirou Yamada, Matsushita Electric Industrial Co., Ltd. (Japan)
Masaki Suzuki, Matsushita Electric Industrial Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 1264:
Optical/Laser Microlithography III
Victor Pol, Editor(s)

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