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Proceedings Paper

Pattern and form recognition of statistically distributed defects on functional optical surfaces
Author(s): P. Kadkhoda; P. Chubak; M. Lassahn; D. Ristau
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Paper Abstract

The inspection of the surface quality of optical components is an essential characterization method for high power laser applications. We report about two different mapping methods based on the measurement of Total Scattering (TS) and phase contrast microscopy. The mappings are used for the determination of the defect density distribution of optical flat surfaces. The mathematical procedure relating data points to a defect area and to the form of objects will be illustrated in details. The involved differential operators and the optimized sub routines adapted to a large number of defects will be underlined. For the decision about the form of the objects, a parameter set including the “fill factor”, “edge ratio” and the “polar distance” will be discussed in respect to their versatility range for the basic forms. The calculated distribution will be expressed in terms of affine probability compared to the basic forms. The extracted size and form distribution function of the defects will be presented for selected high reflective and anti-reflective coating samples.

Paper Details

Date Published: 24 May 2013
PDF: 9 pages
Proc. SPIE 8791, Videometrics, Range Imaging, and Applications XII; and Automated Visual Inspection, 87911C (24 May 2013); doi: 10.1117/12.2018999
Show Author Affiliations
P. Kadkhoda, Laser Zentrum Hannover e.V. (Germany)
P. Chubak, Hannover Univ. of Applied Sciences and Arts (Germany)
M. Lassahn, Hannover Univ. of Applied Sciences and Arts (Germany)
D. Ristau, Laser Zentrum Hannover e.V. (Germany)

Published in SPIE Proceedings Vol. 8791:
Videometrics, Range Imaging, and Applications XII; and Automated Visual Inspection
Fabio Remondino; Jürgen Beyerer; Fernando Puente León; Mark R. Shortis, Editor(s)

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