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Proceedings Paper

A phase-stepped white light ellipsometer
Author(s): Lionel R. Watkins
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Paper Abstract

We describe a spectroscopic ellipsometer which uses a variable waveplate to generate four phase-stepped intensities I (λ) of a white light source which are recorded by a small spectrometer. At each wavelength, the variable waveplate produces a constant, but unknown phase step α. We use Carré’s algorithm to determine the unknown phase step α at each wavelength and thence the ellipsometric angles ψ and Δ. We demonstrate our new instrument experimentally by measuring the retardation of an achromatic waveleplate and determining the thickness of silicon dioxide films on a silicon substrate.

Paper Details

Date Published: 22 June 2013
PDF: 6 pages
Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 876918 (22 June 2013); doi: 10.1117/12.2018961
Show Author Affiliations
Lionel R. Watkins, The Univ. of Auckland (New Zealand)


Published in SPIE Proceedings Vol. 8769:
International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013)
Chenggen Quan; Kemao Qian; Anand Asundi, Editor(s)

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