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Proceedings Paper

Calibration of misalignment aberrations in cylindrical surface interferometric measurement
Author(s): Junzheng Peng; Dongbao Ge; Yingjie Yu; Mingyi Chen
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Paper Abstract

This paper presents a misalignment aberrations calibration method for the interferometric testing of cylindrical surface. This approach is based on a simple polynomials function, which is deduced by analyzing the geometry of the misalignment aberrations and perfectly describes the relationship between the misalignment aberrations and the corresponding adjustment errors. A least-squares algorithm for calibration of the misalignment aberrations was implemented towards the measured phase data, and the adjustment errors can be estimated through the proposed mathematical model. Then by subtracting the fitting function from the measured phase data, the misalignment aberrations and the genuine deviation of the test cylindrical surface can be completely separated. By means of simulation and experimental results, the repeatability and accuracy of the technique are discussed.

Paper Details

Date Published: 13 May 2013
PDF: 13 pages
Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 878829 (13 May 2013); doi: 10.1117/12.2018919
Show Author Affiliations
Junzheng Peng, Shanghai Univ. (China)
Dongbao Ge, Shanghai Univ. (China)
Yingjie Yu, Shanghai Univ. (China)
Mingyi Chen, Shanghai Univ. (China)

Published in SPIE Proceedings Vol. 8788:
Optical Measurement Systems for Industrial Inspection VIII
Peter H. Lehmann; Wolfgang Osten; Armando Albertazzi, Editor(s)

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