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Proceedings Paper

Alternative displacement sensor with reflection type holographic grating
Author(s): Yao-Yuan Ho; Zhi-Ru Lin; Cheng-Chih Hsu; Chyan-Chyi Wu; Ju-Yi Lee
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Paper Abstract

In this study, we proposed an alternative displacement sensor which constructed with reflection type holographic diffraction grating. To integrate with the truly phase detection heterodyne interferometer, and then the in-plane displacement can be measured with sub-nanometer displacement resolution. The smallest variation can be observed of proposed method is approximately 20 pm and there are no significant differences between proposed method and comparison methods. Furthermore, we evaluated the thermal property of the hologram and showed that the grating pitch variation is smaller than 0.1 nm for temperature variations within 1 °C. According to these findings, we can conclude that the holographic grating can be an alternative displacement sensor with high sensitivity and high stability.

Paper Details

Date Published: 22 June 2013
PDF: 7 pages
Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87693K (22 June 2013); doi: 10.1117/12.2018657
Show Author Affiliations
Yao-Yuan Ho, Yuan Ze Univ. (Taiwan)
Zhi-Ru Lin, Yuan Ze Univ. (Taiwan)
Cheng-Chih Hsu, Yuan Ze Univ. (Taiwan)
Chyan-Chyi Wu, Tamkang Univ. (Taiwan)
Ju-Yi Lee, National Central Univ. (Taiwan)


Published in SPIE Proceedings Vol. 8769:
International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013)
Chenggen Quan; Kemao Qian; Anand Asundi, Editor(s)

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