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Proceedings Paper

Travelling wave resonators fabricated with low-loss hydrogenated amorphous silicon
Author(s): Timo Lipka; Julia Amthor; Hoc Khiem Trieu; Jörg Müller
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Paper Abstract

Low-loss hydrogenated amorphous silicon is employed for the fabrication of various planar integrated travelling wave resonators. Microring, racetrack, and disk resonators of different dimensions were fabricated with CMOS-compatible processes and systematically investigated. The key properties of notch filter ring resonators as extinction ratio, Q-factor, free spectral range, and the group refractive index were determined for resonators of varying radius, thereby achieving critically coupled photonic systems with high extinction ratios of about 20 dB for both polarizations. Racetrack resonators that are arranged in add/drop configuration and high quality factor microdisk resonators were optically characterized, with the microdisks exhibiting Q-factors of greater than 100000. Four-channel add/drop wavelength-division multiplexing filters that are based on cascaded racetrack resonators are studied. The design, the fabrication, and the optical characterization are presented.

Paper Details

Date Published: 22 May 2013
PDF: 12 pages
Proc. SPIE 8767, Integrated Photonics: Materials, Devices, and Applications II, 876707 (22 May 2013); doi: 10.1117/12.2018509
Show Author Affiliations
Timo Lipka, Technische Univ. Hamburg (Germany)
Julia Amthor, Technische Univ. Hamburg (Germany)
Hoc Khiem Trieu, Technische Univ. Hamburg (Germany)
Jörg Müller, Technische Univ. Hamburg (Germany)

Published in SPIE Proceedings Vol. 8767:
Integrated Photonics: Materials, Devices, and Applications II
Jean-Marc Fédéli; Laurent Vivien; Meint K. Smit, Editor(s)

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