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Proceedings Paper

High-numerical-aperture I-line stepper
Author(s): Barton A. Katz; James S. Greeneich; Mark G. Bigelow; Ann Katz; Frits J. van Hout; Jos F. Coolsen
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Paper Details

Date Published: 1 June 1990
PDF: 33 pages
Proc. SPIE 1264, Optical/Laser Microlithography III, (1 June 1990); doi: 10.1117/12.20183
Show Author Affiliations
Barton A. Katz, ASM Lithography, Inc. (United States)
James S. Greeneich, ASM Lithography, Inc. (United States)
Mark G. Bigelow, ASM Lithography, Inc. (United States)
Ann Katz, ASM Lithography, Inc. (United States)
Frits J. van Hout, ASM Lithography, B.V. (Netherlands)
Jos F. Coolsen, ASM Lithography, B.V. (Netherlands)

Published in SPIE Proceedings Vol. 1264:
Optical/Laser Microlithography III
Victor Pol, Editor(s)

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