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Proceedings Paper

Comparative analysis of absolute methods to test rotationally asymmetric surface deviation
Author(s): Weihong Song; Xi Hou; Fan Wu; Wenchuan Zhao
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Paper Abstract

We have provided a comparative analysis of methods that involves multi-angle averaging, pseudo multi-angle averaging, single-rotation and variants based on the combinations. All these methods require measurement results being determined at rotational positions, serving for the interferometric measurement of rotationally asymmetric surface deviation of a specimen. Zernike coefficients and power spectral density (PSD) are computed and used for detailed comparison. The experimental results show that single-rotation method gives noticeably smoother result, thus it is limited to applications of measuring low spatial frequency deviations, taking the advantage of quick measurement time with fairly accurate rms results and potentially less influence of environment; in contrast, the result with multi-angle averaging contains more information of mid and high spatial frequency but it’s time-consuming. The pseudo multi-averaging method is the concise variant with fewer measurements. Its result contains more noise errors depending on the number of rotational measurements of multi-averaging method.

Paper Details

Date Published: 13 May 2013
PDF: 7 pages
Proc. SPIE 8789, Modeling Aspects in Optical Metrology IV, 87890Z (13 May 2013); doi: 10.1117/12.2018219
Show Author Affiliations
Weihong Song, Institute of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Xi Hou, Institute of Optics and Electronics (China)
Fan Wu, Institute of Optics and Electronics (China)
Wenchuan Zhao, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 8789:
Modeling Aspects in Optical Metrology IV
Bernd Bodermann; Karsten Frenner; Richard M. Silver, Editor(s)

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