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Proceedings Paper

New negative resist design with novel photo-base generator
Author(s): Wen-Yun Wang; Cheng Han Wu; Yu-Chang Su; Chen-Hao Wu; Ya-Hui Chang; Ching-Yu Chang; Yao-Ching Ku
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Paper Abstract

An alternate negative tone resist is investigated for advanced lithography. Unlike conventional negative tone development (NTD) resists developed with organic solvent, this negative resist use TMAH as its developer. Thermal acid generator (TAG) and photo base generator (PBG) are proposed for this resist. PBG decomposes and generates alkali at the exposed area and neutralizes the acid from TAG. Hence, positive resist can produce negative tone image (NTI), and gain better optical contrast than positive tone imaging. The new negative resist reported in this paper also shows better resolution than conventional negative resist. Several optimization studies are also reported. In addition, major limitations on further improving resist resolution are also pointed out in this paper. The solution proposed has been proven workable from experimental results. This opens the possibility to combine better optical contrast from NTI, high resist resolution from positive resist resin, and better development contrast from TMAH solution.

Paper Details

Date Published: 29 March 2013
PDF: 9 pages
Proc. SPIE 8682, Advances in Resist Materials and Processing Technology XXX, 86821Y (29 March 2013); doi: 10.1117/12.2018113
Show Author Affiliations
Wen-Yun Wang, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)
Cheng Han Wu, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)
Yu-Chang Su, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)
Chen-Hao Wu, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)
Ya-Hui Chang, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)
Ching-Yu Chang, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)
Yao-Ching Ku, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)


Published in SPIE Proceedings Vol. 8682:
Advances in Resist Materials and Processing Technology XXX
Mark H. Somervell, Editor(s)

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