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Proceedings Paper

Image quality of higher NA I-line projection lens
Author(s): Shinichi Nakamura; Koichi Matsumoto; Kazuo Ushida; Masaomi Kameyama
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Paper Details

Date Published: 1 June 1990
PDF: 10 pages
Proc. SPIE 1264, Optical/Laser Microlithography III, (1 June 1990); doi: 10.1117/12.20181
Show Author Affiliations
Shinichi Nakamura, Nikon Corp. (Japan)
Koichi Matsumoto, Nikon Corp. (Japan)
Kazuo Ushida, Nikon Corp. (Japan)
Masaomi Kameyama, Nikon Corp. (Japan)

Published in SPIE Proceedings Vol. 1264:
Optical/Laser Microlithography III
Victor Pol, Editor(s)

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