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Proceedings Paper

Temperature oscillations in a silicon wafer under constant power of incoherent irradiation by heating lamps in a thermal chamber of RTP set up
Author(s): Valery I. Rudakov; Aleksey L Kurenya; Vladimir V. Ovcharov; Valeriya P Prigara
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Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 875910; doi: 10.1117/12.2018009
Show Author Affiliations
Valery I. Rudakov, Yaroslavl branch Physics Technology institute (Russian Federation)
Aleksey L Kurenya, Yaroslavl branch Physics Technology institute (Russian Federation)
Vladimir V. Ovcharov, Yaroslavl branch Physics Technology institute (Russian Federation)
Valeriya P Prigara, Yaroslavl branch Physics Technology institute (Russian Federation)


Published in SPIE Proceedings Vol. 8759:
Eighth International Symposium on Precision Engineering Measurement and Instrumentation
Jie Lin, Editor(s)

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