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Proceedings Paper

Thermally actuated micropump for biological and medical application
Author(s): D. Rabaud; R. Lefevre; A. Salette; L. Dargent; H. Marko; Q. Le Masne; C. Dehan; P. Morfouli; L. Montès
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Paper Abstract

While most actual micropumps use piezoelectric based actuators, we present an original approach based on bimetallic effect for deflecting a flexible silicon membranes. We have simulated, fabricated and characterized fully integrated thermally actuated membranes. Analytical and numerical models have been used to simulate and optimize the performance of the actuated diaphragm. It predicts the deflection behavior under definite power actuation and pressure. In particular, heat transfer analysis is conducted to evaluate temperature field distribution within the device. High displacements (~80μm) where obtained under low driving power. Our results show a very good fit between experiments under pressure and theoretical predictions.

Paper Details

Date Published: 10 June 2013
PDF: 10 pages
Proc. SPIE 8765, Bio-MEMS and Medical Microdevices, 876506 (10 June 2013); doi: 10.1117/12.2017916
Show Author Affiliations
D. Rabaud, IMEP-LAHC (France)
R. Lefevre, IMEP-LAHC (France)
A. Salette, IMEP-LAHC (France)
L. Dargent, IMEP-LAHC (France)
H. Marko, IMEP-LAHC (France)
Q. Le Masne, Eveon SAS (France)
C. Dehan, Eveon SAS (France)
P. Morfouli, Eveon SAS (France)
L. Montès, Eveon SAS (France)


Published in SPIE Proceedings Vol. 8765:
Bio-MEMS and Medical Microdevices
Angeliki Tserepi; Manuel Delgado-Restituto; Eleni Makarona, Editor(s)

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