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Proceedings Paper

A grating microcantilever biosensor based on diffraction spectrum feedback balanced
Author(s): Feng Wen; Yuejin Zhao; Xiaomei Yu
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Paper Abstract

A kind of novel reflective grating microcantilever based on SOI was designed and fabricated for biosensing. For measuring the extremely low deflections of the microcantilever, a high precision optical readout approach based on diffraction spectrum balancing feedback control was presented. The read out system include a PI M-038 precision motorized rotation stage, a CCD, a 650 nm laser, a fiber, a min fiber GRIN collimator and lens. The practical measurement resolution of the system is up to 1x10-4 deg, that is to say, for a length of 250um microcantilever, the tip measure resolution is up to 0.043nm.

Paper Details

Date Published: 20 May 2013
PDF: 5 pages
Proc. SPIE 8879, Nano-Bio Sensing, Imaging, and Spectroscopy, 88790Y (20 May 2013); doi: 10.1117/12.2017714
Show Author Affiliations
Feng Wen, Beijing Institute of Technology (China)
North Univ. of China (China)
Yuejin Zhao, Beijing Institute of Technology (China)
Xiaomei Yu, Peking Univ. (China)


Published in SPIE Proceedings Vol. 8879:
Nano-Bio Sensing, Imaging, and Spectroscopy
Shin Won Kang; Seung-Han Park; Luke P. Lee; Ki-Bong Song; Yo Han Choi, Editor(s)

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