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Proceedings Paper

Study of EUV and x-ray radiation hardness of silicon photodiodes
Author(s): Vladimir V. Zabrodsky; Pavel Aruev; Vladimir V. Filimonov; Nikolay A. Sobolev; Evgeniy V. Sherstnev; Viktor P. Belik; Anton D. Nikolenko; Denis V. Ivlyushkin; Valery F. Pindyurin; Nikita S. Shadrin; Artem E. Soldatov; Mikhail R. Mashkovtsev
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Paper Abstract

This work presents the results of long-term observation of the silicon photodiodes spatial profile response and the silicon photodiodes dark current after their exposure to 10.2 eV quanta and in the spectral range of 150–300 eV. Exposure of the photodiodes to quanta of an energy of 10.2 eV was repeated. Several other photodiodes have been irradiated in the spectral range of 700-1800 eV with a dose of 8 J/cm2. The spatial profile of the irradiated photodiodes was studied with 3.49 eV, 10.2 eV and 100 eV quanta. The effect of the recovery of the response spatial profile has been proved for the p+-n diode. An additional useful method of visualization of irradiated photodiode area is also presented.

Paper Details

Date Published: 3 May 2013
PDF: 7 pages
Proc. SPIE 8777, Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III, 87770R (3 May 2013); doi: 10.1117/12.2017478
Show Author Affiliations
Vladimir V. Zabrodsky, Ioffe Physico-Technical Institute (Russian Federation)
Pavel Aruev, Ioffe Physico-Technical Institute (Russian Federation)
Vladimir V. Filimonov, Ioffe Physico-Technical Institute (Russian Federation)
Nikolay A. Sobolev, Ioffe Physico-Technical Institute (Russian Federation)
Evgeniy V. Sherstnev, Ioffe Physico-Technical Institute (Russian Federation)
Viktor P. Belik, Ioffe Physico-Technical Institute (Russian Federation)
Anton D. Nikolenko, Budker Institute of Nuclear Physics (Russian Federation)
Denis V. Ivlyushkin, Budker Institute of Nuclear Physics (Russian Federation)
Valery F. Pindyurin, Budker Institute of Nuclear Physics (Russian Federation)
Nikita S. Shadrin, Budker Institute of Nuclear Physics (Russian Federation)
Artem E. Soldatov, Budker Institute of Nuclear Physics (Russian Federation)
Mikhail R. Mashkovtsev, Budker Institute of Nuclear Physics (Russian Federation)


Published in SPIE Proceedings Vol. 8777:
Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III
Libor Juha; René Hudec; Ladislav Pina; Saša Bajt; Richard London, Editor(s)

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