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Proceedings Paper

Thermo-optic simulations of silicon nitride / polymer hybrid waveguides
Author(s): Anjin Liu; Ziyang Zhang; Dongliang Liu; Norbert Keil; Norbert Grote
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Paper Abstract

We perform the thermal and optical simulations of silicon nitride / polymer hybrid waveguides with different heating schemes by finite element method. Both the top and buried microheaters are adopted to realize tuning function by the thermo-optic effect. We find the buried microheater is more energy-efficient than the top microheater in creating a uniformed temperature environment in the waveguide region. On the other hand, the top electrode tends to create a strong temperature gradient through the waveguide, which in turn distorts the optical mode. This distortion, however, is different for TE and TM modes. This thermally induced birefringence effect is thoroughly investigated in this paper.

Paper Details

Date Published: 7 May 2013
PDF: 7 pages
Proc. SPIE 8781, Integrated Optics: Physics and Simulations, 878105 (7 May 2013); doi: 10.1117/12.2017466
Show Author Affiliations
Anjin Liu, Fraunhofer-Institut für Nachrichtentechnik Heinrich-Hertz-Institut (Germany)
Ziyang Zhang, Fraunhofer-Institut für Nachrichtentechnik Heinrich-Hertz-Institut (Germany)
Dongliang Liu, Fraunhofer-Institut für Nachrichtentechnik Heinrich-Hertz-Institut (Germany)
Norbert Keil, Fraunhofer-Institut für Nachrichtentechnik Heinrich-Hertz-Institut (Germany)
Norbert Grote, Fraunhofer-Institut für Nachrichtentechnik Heinrich-Hertz-Institut (Germany)


Published in SPIE Proceedings Vol. 8781:
Integrated Optics: Physics and Simulations
Pavel Cheben; Jiří Čtyroký; Iñigo Molina-Fernandez, Editor(s)

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