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Proceedings Paper

Simulation of thick film PZT actuators with interdigitated electrodes
Author(s): Mohanad Mohammed Zaki; Sandy Zähringer; Norbert Schwesinger
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Paper Abstract

This paper deals with the simulation of membrane actuators based on thick film piezoelectric ceramics with interdigitated electrodes using the finite element method. A modified piezoelectric coupling matrix is introduced to account for the piezoelectric non-linearity due to poling and actuation at high electric fields. Electrodes were fabricated on top of 250 μm thick PZT substrates which were characterized. The experimental data verified the simulation results and proved the necessity of the modified coupling matrix.

Paper Details

Date Published: 17 May 2013
PDF: 8 pages
Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 876338 (17 May 2013); doi: 10.1117/12.2017411
Show Author Affiliations
Mohanad Mohammed Zaki, Technische Univ. München (Germany)
Sandy Zähringer, Technische Univ. München (Germany)
Norbert Schwesinger, Technische Univ. München (Germany)


Published in SPIE Proceedings Vol. 8763:
Smart Sensors, Actuators, and MEMS VI
Ulrich Schmid; José Luis Sánchez de Rojas Aldavero; Monika Leester-Schaedel, Editor(s)

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