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Proceedings Paper

From nature to MEMS: towards the detection-limit of crickets' hair sensors
Author(s): A. M. K. Dagamseh
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Paper Abstract

Crickets use highly sensitive mechanoreceptor hairs to detect approaching spiders. The high sensitivity of these hairs enables perceiving tiny air-movements which are only just distinguishable from noise. This forms our source of inspiration to design sensitive arrays made of artificial hair sensors for flow pattern observation i.e. Flow camera. The realization of such high-sensitive hair sensor requires designs with low thermo-mechanical noise to match the detection-limit of crickets’ hairs. Here we investigate the damping factor in our artificial hair-sensor using different models as it is the source of the thermo-mechanical noise in MEMS structures. The results show that the damping factor estimated in air is in the range of 10-12 N.m/rad.s-1 which translates into a 52 μm/s threshold flow velocity.

Paper Details

Date Published: 17 May 2013
PDF: 5 pages
Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87632P (17 May 2013); doi: 10.1117/12.2017329
Show Author Affiliations
A. M. K. Dagamseh, Yarmouk Univ. (Jordan)
Univ. of Twente (Netherlands)


Published in SPIE Proceedings Vol. 8763:
Smart Sensors, Actuators, and MEMS VI
Ulrich Schmid; José Luis Sánchez de Rojas Aldavero; Monika Leester-Schaedel, Editor(s)

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