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Proceedings Paper

Simulation and design optimization of transparent heaters for spectroscopic micro cells
Author(s): Henning Völlm; Jonathan Herrmann; Reinhard Maier; Dara Feili; Volker Häublein; Heiner Ryssel; Helmut Seidel
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Paper Abstract

For several applications, micro cells with a uniform temperature profile and at least one optical port are required. One example for those cells is the physics package of a chip-scale-atomic-clock. It is necessary that the micro chambers are heated homogeneously to 353 K using a low energy consumption heater. In this work transparent heating structures are investigated to achieve this goal. First an analytical approach is used to describe the behavior of thermal energy dissipation of the heating structures. Then different approaches of possible heater structures are simulated to find the optimal basic configuration. Furthermore, this configuration is optimized to obtain a uniform temperature distribution in the whole cell.

Paper Details

Date Published: 17 May 2013
PDF: 8 pages
Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87632C (17 May 2013); doi: 10.1117/12.2017166
Show Author Affiliations
Henning Völlm, Saarland Univ. (Germany)
Jonathan Herrmann, Saarland Univ. (Germany)
Reinhard Maier, Friedrich Alexander Univ. Erlangen-Nuremberg (Germany)
Dara Feili, Saarland Univ. (Germany)
Volker Häublein, Fraunhofer Institute for Integrated Systems and Device Technology (Germany)
Heiner Ryssel, Friedrich Alexander Univ. Erlangen-Nuremberg (Germany)
Fraunhofer Institute for Integrated Systems and Device Technology (Germany)
Helmut Seidel, Saarland Univ. (Germany)


Published in SPIE Proceedings Vol. 8763:
Smart Sensors, Actuators, and MEMS VI
Ulrich Schmid; José Luis Sánchez de Rojas Aldavero; Monika Leester-Schaedel, Editor(s)

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