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Proceedings Paper

Quality factor enhancement for resonant MEMS applying an analogue feedback circuit driven by a lock-in amplifier
Author(s): Martin Kucera; Franz Hofbauer; Tomás Manzaneque; Victor Ruiz; José Luis Sánchez-Rojas; Achim Bittner; Ulrich Schmid
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Paper Abstract

In this study, an analogue Q-control circuit is presented, based on a digital feedback loop. In this approach, a self-actuated and self-sensing piezoelectric microstructure is used in combination with a lock-in amplifier to extract the Q-control feedback signal amplitude which is proportional to the piezoelectric current. In the next step, the DC-value supported by the lock-in amplifier is multiplied with a sine signal on a custom-designed analogue circuit board containing an analogue amplifier IC. This generated analogue feedback signal allows to drive a complete analogue feedback loop enabling faster response of the Q-control and further faster measurements can be performed. Using this Q-factor enhancement technique, the Q-factor was increased from 397 to about 5357 in air without driving the used Q-control approach to its limits. These promising results will push further activities in measuring the viscosity of liquids in the future.

Paper Details

Date Published: 17 May 2013
PDF: 6 pages
Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87630W (17 May 2013); doi: 10.1117/12.2017131
Show Author Affiliations
Martin Kucera, Vienna Univ. of Technology (Austria)
AC²T research GmbH (Austria)
Franz Hofbauer, Vienna Univ. of Technology (Austria)
Tomás Manzaneque, Univ. de Castilla-La Mancha (Spain)
Victor Ruiz, Univ. de Castilla-La Mancha (Spain)
José Luis Sánchez-Rojas, Univ. de Castilla-La Mancha (Spain)
Achim Bittner, Vienna Univ. of Technology (Austria)
Ulrich Schmid, Vienna Univ. of Technology (Austria)

Published in SPIE Proceedings Vol. 8763:
Smart Sensors, Actuators, and MEMS VI
Ulrich Schmid; José Luis Sánchez de Rojas Aldavero; Monika Leester-Schaedel, Editor(s)

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