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Proceedings Paper

Contour and flexure-actuated in-plane modes of AlN-based piezoelectric vibrating MEMS
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Paper Abstract

In this work, we study the modes of vibration for two different families of aluminium nitride-actuated piezoelectric microstructures: contour modes and flexure-actuated modes. For the contour modes, the structure vibrates at frequencies determined by its edge dimensions whereas for the flexure-actuated modes a suspended structure is displaced by the lateral bending of the flexures. We combine electrical and optical techniques to fully characterize the vibrating modes of these types of in-plane MEMS structures. An electronic speckle pattern interferometry technique is used for a full 3D detection of the movement of the structures. Quality factors as high as 5000 and motional resistance as low as 4 KOhm were obtained for in-plane modes in air and a quality factor as high as 300 was obtained for an in-plane structure with water on the top surface. This work shows the great flexibility in the selection of resonant modes in piezoelectric resonators and actuators, implemented by a proper design of the electrode layout geometry.

Paper Details

Date Published: 17 May 2013
PDF: 7 pages
Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 876333 (17 May 2013); doi: 10.1117/12.2017115
Show Author Affiliations
V. Ruiz-Díaz, Univ. de Castilla-La Mancha (Spain)
T. Manzaneque, Univ. de Castilla-La Mancha (Spain)
J. Hernando-García, Univ. de Castilla-La Mancha (Spain)
A. Ababneh, Yarmouk Univ. (India)
M. Kucera, Vienna Univ. of Technology (Austria)
AC²T research GmbH (Austria)
A. N. Al-Omari, Yarmouk Univ. (India)
A. Bittner, Vienna Univ. of Technology (Austria)
U. Schmid, Vienna Univ. of Technology (Austria)
H. Seidel, Saarland Univ. (Germany)
J. L. Sánchez-Rojas, Univ. de Castilla-La Mancha (Spain)


Published in SPIE Proceedings Vol. 8763:
Smart Sensors, Actuators, and MEMS VI
Ulrich Schmid; José Luis Sánchez de Rojas Aldavero; Monika Leester-Schaedel, Editor(s)

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