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Proceedings Paper

Optical device for precision topography of MOEMS by Moiré inteferometry
Author(s): Saïd Meguellati; Smaïl Djabi
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Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 876314; doi: 10.1117/12.2017067
Show Author Affiliations
Saïd Meguellati, Ferhat Abbas University of SETIF 1 (Algeria)
Smaïl Djabi, Ferhat Abbas University of SETIF 1 (Algeria)


Published in SPIE Proceedings Vol. 8763:
Smart Sensors, Actuators, and MEMS VI
Ulrich Schmid; José Luis Sánchez de Rojas Aldavero; Monika Leester-Schaedel, Editor(s)

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