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Proceedings Paper

Virtual scanning electron microscope
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Paper Abstract

Application of virtual instruments to a process of measurements of geometrical characteristics of investigated objects is considered. Methods of construction of virtual instruments on a base of imitators and simulators are discussed. It is demonstrated, that a virtual scanning electron microscope (SEM) can be constructed only on the base of simulator. Examples of work of the virtual SEM in a low-voltage mode and in modes of registration of back scattered electrons (BSE) and slow secondary of electrons (SSE) are given.

Paper Details

Date Published: 8 January 2013
PDF: 12 pages
Proc. SPIE 8700, International Conference Micro- and Nano-Electronics 2012, 87000X (8 January 2013); doi: 10.1117/12.2016977
Show Author Affiliations
Yu. V. Larionov, A. M. Prokhorov General Physics Institute (Russian Federation)
Yu. A. Novikov, A. M. Prokhorov General Physics Institute (Russian Federation)


Published in SPIE Proceedings Vol. 8700:
International Conference Micro- and Nano-Electronics 2012
Alexander A. Orlikovsky, Editor(s)

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