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Proceedings Paper

Design and fabrication of piezoelectric MEMS
Author(s): Natalya Korobova; Venyamin Vodopyanov; Sergey Timoshenkov
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Paper Abstract

Lead-zirconate-titanate (PZT) is a typical piezoelectric material with outstanding properties. The preparation behavior of Lead Zirconate Titanate (PZT) composite films comprised of Si, SiO2, Pt, PZT and Pt for MEMS applications was investigated. The choice of precursors can affect the microstructures and properties of the product, so in this paper we compared the crystallization behavior of PZT films derived from different precursors, stressing the influence of experiment conditions. Dense PZT films were prepared by electrophoretic deposition method (EPD), using commercial powder PZT precursor and metal alkoxide components for the same composition. Some specific comments were underlined about structure of PZT films.

Paper Details

Date Published: 8 January 2013
PDF: 5 pages
Proc. SPIE 8700, International Conference Micro- and Nano-Electronics 2012, 87000R (8 January 2013); doi: 10.1117/12.2016968
Show Author Affiliations
Natalya Korobova, , National Research Univ. of Electronic Technology (Russian Federation)
Venyamin Vodopyanov, , National Research Univ. of Electronic Technology (Russian Federation)
Sergey Timoshenkov, , National Research Univ. of Electronic Technology (Russian Federation)


Published in SPIE Proceedings Vol. 8700:
International Conference Micro- and Nano-Electronics 2012
Alexander A. Orlikovsky, Editor(s)

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