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Proceedings Paper

Effective probe for scanning electron microscope
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Paper Abstract

Traditional insight of effective probe of scanning electron microscope (SEM) is considered. A contradiction of this insight with experimental results registered at scanning of test objects with the trapezoidal profile and large slope angles by SEM probe is detected. A new insight of effective probe based on analyzes of the experimental results registered by SEM working in a back scattered electron (BSE) mode is proposed.

Paper Details

Date Published: 8 January 2013
PDF: 7 pages
Proc. SPIE 8700, International Conference Micro- and Nano-Electronics 2012, 87000Y (8 January 2013); doi: 10.1117/12.2016917
Show Author Affiliations
Yu. V. Larionov, A. M. Prokhorov General Physics Institute (Russian Federation)
Yu. A. Novikov, A. M. Prokhorov General Physics Institute (Russian Federation)


Published in SPIE Proceedings Vol. 8700:
International Conference Micro- and Nano-Electronics 2012
Alexander A. Orlikovsky, Editor(s)

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