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Proceedings Paper

Holographic nanointerferometer with digital magnification
Author(s): S. A. Pulkin; V. Yu. Venediktov; V. Ivanov; V. I. Korotkov; N. I. Matveyeva; A. V. Panova; I. M. Pasechnik; A. A. Sevrygin; M. A. Solov’ev
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Paper Abstract

The method of holographic interferometry with the increased sensitivity was applied for measurements of height of nano-steps (from 10 nm and higher) with standard uncertainty about 0.5 nm. The increasing of sensitivity is obtained by interference of waves with mutually complex conjugated phases.

Paper Details

Date Published: 3 May 2013
PDF: 6 pages
Proc. SPIE 8776, Holography: Advances and Modern Trends III, 87760C (3 May 2013); doi: 10.1117/12.2016853
Show Author Affiliations
S. A. Pulkin, Saint-Petersburg State Univ. (Russian Federation)
V. Yu. Venediktov, Saint-Petersburg State Univ. (Russian Federation)
Saint-Petersburg State Electrotechnical Institute (Russian Federation)
S.I. Vavilov State Optical Institute (Russian Federation)
V. Ivanov, Saint-Petersburg State Univ. (Russian Federation)
V. I. Korotkov, Saint-Petersburg State Univ. (Russian Federation)
N. I. Matveyeva, Saint-Petersburg State Univ. (Russian Federation)
A. V. Panova, S.I. Vavilov State Optical Institute (Russian Federation)
I. M. Pasechnik, Saint-Petersburg State Univ. (Russian Federation)
A. A. Sevrygin, Saint-Petersburg State Electrotechnical Institute (Russian Federation)
M. A. Solov’ev, S.I. Vavilov State Optical Institute (Russian Federation)


Published in SPIE Proceedings Vol. 8776:
Holography: Advances and Modern Trends III
Miroslav Hrabovský; John T. Sheridan; Antonio Fimia-Gil, Editor(s)

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