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Proceedings Paper

Optical position feedback of quasi-static 2D MOEMS mirrors
Author(s): A. Tortschanoff; M. Baumgart; D. Holzmann; M. Lenzhofer; T. Sandner; A. Kenda
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Paper Abstract

Recently, we have realized a new position sensing device for MOEMS mirrors applicable to arbitrary trajectories, which is based on the measurement of a reflected light beam with a quadrant diode. In this work we present the characteristics of this device, showing first experimental results obtained with a test set-up, but also theoretical considerations and optical ray-tracing simulations.

Paper Details

Date Published: 17 May 2013
PDF: 7 pages
Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87630J (17 May 2013); doi: 10.1117/12.2016852
Show Author Affiliations
A. Tortschanoff, Carinthian Tech Research AG (Austria)
M. Baumgart, Carinthian Tech Research AG (Austria)
D. Holzmann, Carinthian Tech Research AG (Austria)
M. Lenzhofer, Carinthian Tech Research AG (Austria)
T. Sandner, Fraunhofer Institute for Photonic Microsystems (Germany)
A. Kenda, Carinthian Tech Research AG (Austria)


Published in SPIE Proceedings Vol. 8763:
Smart Sensors, Actuators, and MEMS VI
Ulrich Schmid; José Luis Sánchez de Rojas Aldavero; Monika Leester-Schaedel, Editor(s)

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