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Proceedings Paper

Mechanisms of image formation in SEM
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Paper Abstract

Semi empirical model of image formation is proposed for scanning electron microscope (SEM) working in low and high voltage modes with registration of back scattered (BSE) and slow secondary (SSE) electrons. The model is based on analysis of experiments executed with a test object with trapezoidal profile and with large slope angles scanned in a SEM. The model is designated for application in virtual SEM.

Paper Details

Date Published: 8 January 2013
PDF: 7 pages
Proc. SPIE 8700, International Conference Micro- and Nano-Electronics 2012, 87000W (8 January 2013); doi: 10.1117/12.2016850
Show Author Affiliations
Yu. V. Larionov, A. M. Prokhorov General Physics Institute (Russian Federation)
Yu. A. Novikov, A. M. Prokhorov General Physics Institute (Russian Federation)


Published in SPIE Proceedings Vol. 8700:
International Conference Micro- and Nano-Electronics 2012
Alexander A. Orlikovsky, Editor(s)

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