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Proceedings Paper

Direct imprinting on chalcogenide glass and fabrication of infrared wire-grid polarizer
Author(s): Itsunari Yamada; Naoto Yamashita; Toshihiko Einishi; Mitsunori Saito; Kouhei Fukumi; Junji Nishii
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Paper Abstract

Infrared wire-grid polarizers were fabricated consisting of a 500-nm pitch Al grating on a low toxic chalcogenide glass (Sb-Ge-Sn-S system) using the direct imprinting of subwavelength grating followed by a deposition of Al metal by thermal evaporation. To fabricate the subwavelength grating on a chalcogenide glass more easily, the sharp grating was formed on the mold surface. The fabricated polarizer with Al thickness of 130 nm exhibited a polarization function with a transverse magnetic transmittance greater than 60% in the 5–9-μm wavelength range, and an extinction ratio greater than 20 dB in the 4–11-μm wavelength range. The polarizer can be fabricated at lower costs and simpler fabrication processes compared to conventional infrared polarizers.

Paper Details

Date Published: 22 May 2013
PDF: 9 pages
Proc. SPIE 8767, Integrated Photonics: Materials, Devices, and Applications II, 87670X (22 May 2013); doi: 10.1117/12.2016652
Show Author Affiliations
Itsunari Yamada, Univ. of Shiga Prefecture (Japan)
Naoto Yamashita, Isuzu Glass Co., Ltd. (Japan)
Toshihiko Einishi, Isuzu Glass Co., Ltd. (Japan)
Mitsunori Saito, Ryukoku Univ. (Japan)
Kouhei Fukumi, National Institute of Advanced Industrial Science and Technology (Japan)
Junji Nishii, Hokkaido Univ. (Japan)


Published in SPIE Proceedings Vol. 8767:
Integrated Photonics: Materials, Devices, and Applications II
Jean-Marc Fédéli; Laurent Vivien; Meint K. Smit, Editor(s)

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