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Proceedings Paper

Experimental study on the absolute measurement of spherical surface with high accuracy
Author(s): Xi Hou; Weihong Song; Fan Wu; Liming Lu
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Paper Abstract

The absolute measurement of spherical surface with multiple relative measurements is used widely in high accuracy interferometry, which can obtain the absolute surface data of the tested spherical surface. We present an experimental study on the different absolute methods of two-sphere, random-ball-averaging and shift-rotation to calibrate the spherical reference of a same transmission sphere with high accuracy. The experimental results show that the reference surface deviation measured with the different absolute methods agrees well with each other, with the fact that the difference of rms is ~0.6nm.

Paper Details

Date Published: 31 January 2013
PDF: 5 pages
Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87594M (31 January 2013); doi: 10.1117/12.2016642
Show Author Affiliations
Xi Hou, Institute of Optics and Electronics (China)
Weihong Song, Institute of Optics and Electronics (China)
Graduate School of the Chinese Academy of Sciences (China)
Fan Wu, Institute of Optics and Electronics (China)
Liming Lu, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 8759:
Eighth International Symposium on Precision Engineering Measurement and Instrumentation
Jie Lin, Editor(s)

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