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Proceedings Paper

Fabrication of an array-like freeform molding tool for UV-replication using a step and repeat process
Author(s): J. Dunkel; F. Wippermann; A. Brückner; A. Reimann; A. Bräuer
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Paper Abstract

Artificial compound eye cameras are a prominent approach of next generation wafer level cameras for consumer electronics due to their lower z-height compared to conventional single aperture objectives. In order to address low cost and high volume markets, their fabrication is based on a wafer level UV-replication process. The image quality of compound eye cameras can be increased significantly by the use of refractive freeform arrays (RFFA) instead of conventional microlens arrays. Therefore, we present the fabrication of a RFFA wafer level molding tool by a step and repeat process for the first time. The surface qualities of the fabricated structures were characterized with a white light interferometer.

Paper Details

Date Published: 17 May 2013
PDF: 6 pages
Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 876330 (17 May 2013); doi: 10.1117/12.2016534
Show Author Affiliations
J. Dunkel, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Friedrich-Schiller-Univ. Jena (Germany)
F. Wippermann, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
A. Brückner, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
A. Reimann, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
A. Bräuer, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)


Published in SPIE Proceedings Vol. 8763:
Smart Sensors, Actuators, and MEMS VI
Ulrich Schmid; José Luis Sánchez de Rojas Aldavero; Monika Leester-Schaedel, Editor(s)

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