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Proceedings Paper

Metal oxide nanowire gas sensors for indoor and outdoor environmental monitoring
Author(s): Anton Köck; Elise Brunet; Oliver Freudenberg; Christoph Gamauf; Jochen Kraft; Giorgio C. Mutinati; Thomas Maier; Alexander Nemecek; Franz Schrank; Martin Schrems; Martin Siegele; Jörg Siegert; Stephan Steinhauer; Jordi Teva
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Paper Abstract

We present performance results of SnO2 and CuO nanowire gas sensor devices, where single and multi-nanowire device configurations have been employed in order to optimize sensor design. In particular the response to the target gases CO, H2, and H2S has been measured in dry and humid air; both the SnO2 and CuO nanowire sensors are able to detect CO in the low ppm concentration range, which is important for environmental monitoring. The CuO multi-nanowire devices show an extraordinary high response to H2S with sensitivity in the low ppb concentration. We present our developments of CMOS technology based micro-hotplates, which are employed as platform for gas sensitive thin films and nanowires. Potential heterogeneous integration of nanowires on the micro-hotplate chips as well as an approach towards gas sensor arrays is discussed. We conclude that CMOS integrated multi-nanowire gas sensors are highly promising candidates for the practical realization of multi-parameter sensor devices for indoor and outdoor environmental monitoring.

Paper Details

Date Published: 29 May 2013
PDF: 12 pages
Proc. SPIE 8725, Micro- and Nanotechnology Sensors, Systems, and Applications V, 87250L (29 May 2013); doi: 10.1117/12.2016526
Show Author Affiliations
Anton Köck, AIT Austrian Institute of Technology GmbH (Austria)
Elise Brunet, AIT Austrian Institute of Technology GmbH (Austria)
Oliver Freudenberg, Siemens AG (Germany)
Christoph Gamauf, Univ. of Applied Sciences Wiener Neustadt (Austria)
Jochen Kraft, austriamicrosystems AG (Austria)
Giorgio C. Mutinati, AIT Austrian Institute of Technology GmbH (Austria)
Thomas Maier, AIT Austrian Institute of Technology GmbH (Austria)
Alexander Nemecek, Univ. of Applied Sciences Wiener Neustadt (Austria)
Franz Schrank, austriamicrosystems AG (Austria)
Martin Schrems, austriamicrosystems AG (Austria)
Martin Siegele, Univ. of Applied Sciences Wiener Neustadt (Austria)
Jörg Siegert, austriamicrosystems AG (Austria)
Stephan Steinhauer, AIT Austrian Institute of Technology GmbH (Austria)
Jordi Teva, austriamicrosystems AG (Austria)


Published in SPIE Proceedings Vol. 8725:
Micro- and Nanotechnology Sensors, Systems, and Applications V
Thomas George; M. Saif Islam; Achyut K. Dutta, Editor(s)

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