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Proceedings Paper

Three-dimensional dual-band stacked microbolometer design using resistive dipoles and slots
Author(s): Hoo Kim; Dean P. Neikirk
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Paper Abstract

A dual-band microbolometer with separate absorption of each wavelength band would be desirable for multispectral applications. In addition, a three dimensional (3D) stacked structure would be advantageous for size and integration in focal plane arrays. We present designs for a 3D stacked dual-band microbolometer based on the in-band and out-of-band reflection and transmission characteristics of resistive dipoles and slots. The mechanism of individual absorption in each layer of a dual-band microbolometer is analyzed and simulated to allow the resistive slot layer to efficiently absorb the LWIR band while a superposed resistive dipole layer absorbs the MWIR band. The top dipole layer is designed to have peak absorption at 5 μm, with a second underlying slot layer and mirror layer designed to have peak absorption at 10 μm. The stacked combination of two different types of layers provides highly efficient wavelength selective absorption, yielding calculated power absorption efficiency of nearly 100 % for both LWIR and MWIR bands.

Paper Details

Date Published: 11 June 2013
PDF: 5 pages
Proc. SPIE 8704, Infrared Technology and Applications XXXIX, 870419 (11 June 2013); doi: 10.1117/12.2016405
Show Author Affiliations
Hoo Kim, The Univ. of Texas at Austin (United States)
Dean P. Neikirk, The Univ. of Texas at Austin (United States)


Published in SPIE Proceedings Vol. 8704:
Infrared Technology and Applications XXXIX
Bjørn F. Andresen; Gabor F. Fulop; Charles M. Hanson; Paul R. Norton; Patrick Robert, Editor(s)

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