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Proceedings Paper

Hydrocarbon gas detection with microelectromechanical Fabry-Perot interferometer
Author(s): Rami Mannila; Mikko Tuohiniemi; Jussi Mäkynen; Ismo Näkki; Jarkko Antila
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Paper Abstract

VTT Technical Research Centre of Finland has developed microelectromechanical (MEMS) Fabry-Perot interferometer (FPI) for hydrocarbon measurements. Fabry-Perot interferometer is a structure where is two highly reflective surfaces separated by a tunable air gap. The MEMS FPI is a monolithic device, i.e. it is made entirely on one substrate in a batch process, without assembling separate pieces together. The gap is adjusted by moving the upper mirror with electrostatic force, so there are no actual moving parts. The manufactured MEMS FPIs have been characterized. The tuning wavelength range of the MEMS FPI is 2.8-3.5 μm and its spectral resolution is 50-60 nm. VTT has designed and manufactured a handheld size demonstrator device based on the technology presented in this abstract. This device demonstrates gas detecting by measuring cigarette lighter gas and various plastic materials transmission spectra. The demonstrator contains light source, gas cell, MEMS FPI, detector and control electronics. It is connected to a laptop by USB connection, additional power supply or connection is not needed.

Paper Details

Date Published: 29 May 2013
PDF: 9 pages
Proc. SPIE 8726, Next-Generation Spectroscopic Technologies VI, 872608 (29 May 2013); doi: 10.1117/12.2016362
Show Author Affiliations
Rami Mannila, VTT Technical Research Ctr. of Finland (Finland)
Mikko Tuohiniemi, VTT Technical Research Ctr. of Finland (Finland)
Jussi Mäkynen, VTT Technical Research Ctr. of Finland (Finland)
Ismo Näkki, VTT Technical Research Ctr. of Finland (Finland)
Jarkko Antila, VTT Technical Research Ctr. of Finland (Finland)


Published in SPIE Proceedings Vol. 8726:
Next-Generation Spectroscopic Technologies VI
Mark A. Druy; Richard A. Crocombe, Editor(s)

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