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Proceedings Paper

Amorphous Ge2Sb2Te5 Chemical Mechanical Planarization using KClO4 as oxidizer in Acidic Slurry
Author(s): Aodong He
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Proc. SPIE 8782, 2012 International Workshop on Information Storage and Ninth International Symposium on Optical Storage, ; doi: 10.1117/12.2015250
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Aodong He, Shanghai Institute of Microsystem and Information Technology (China)


Published in SPIE Proceedings Vol. 8782:
2012 International Workshop on Information Storage and Ninth International Symposium on Optical Storage
Fuxi Gan; Zhitang Song, Editor(s)

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