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Proceedings Paper

Character measurement and analyzing of micro optical lenses array fabricated by UV-imprint
Author(s): Nan Liu; Peng Jin; Jiubin Tan
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Paper Abstract

Micro lens array used in parallel laser direct writing process is fabricated with UV imprinting and dry etching. Experiment results show that the relief of fabrication result is confirmed with that of original stamp. And the optical character test experiments show that the focused spot array under both writing laser and focusing test laser is similar. And the single spot profile under both writing laser and focusing test laser is also similar.

Paper Details

Date Published: 31 January 2013
PDF: 5 pages
Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 875951 (31 January 2013); doi: 10.1117/12.2015118
Show Author Affiliations
Nan Liu, Harbin Institute of Technology (China)
Peng Jin, Harbin Institute of Technology (China)
Jiubin Tan, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 8759:
Eighth International Symposium on Precision Engineering Measurement and Instrumentation
Jie Lin, Editor(s)

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