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Proceedings Paper

Micro-hole fabrication based on focus-shaped radially polarized beams
Author(s): Furong Du; Zhehai Zhou; Xiaoqing Zhang; Lianqing Zhu
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Paper Abstract

A micro-hole fabrication scheme based on focus-shaped radially polarized beams is presented. First, a micro-hole fabrication system is demonstrated based on the focus shaping of radially polarized beams, where a high energy ultra-small spot with a long depth of focus can be obtained by focus shaping using the combination of a diffractive optical element (DOE) and a high numerical-aperture objective, and such focused spot is preferred to fabricate the micro-hole with a high ratio of depth and radius. Then, diffractive optical elements (DOEs) are designed to achieve such ultra-small spots with a long depth of focus using the global search algorithm, and the focus-shaped field intensities are calculated based on vector diffraction theory. Finally, a conclusion is drawn from the theoretical analysis and numerical simulation, and focus-shaped radially polarized beams are suitable to fabricate the micro-hole with a high ratio of depth and radius.

Paper Details

Date Published: 31 January 2013
PDF: 7 pages
Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87593J (31 January 2013); doi: 10.1117/12.2015094
Show Author Affiliations
Furong Du, Beijing Information Science and Technology Univ. (China)
Zhehai Zhou, Beijing Information Science and Technology Univ. (China)
Science and Technology on Electro-Optical Information Security Control Lab. (China)
Xiaoqing Zhang, Beijing Information Science and Technology Univ. (China)
Lianqing Zhu, Beijing Information Science and Technology Univ. (China)


Published in SPIE Proceedings Vol. 8759:
Eighth International Symposium on Precision Engineering Measurement and Instrumentation
Jie Lin, Editor(s)

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