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Proceedings Paper

Three-dimensional surface measurement by amplified off-axis digital holography
Author(s): Wu You; Xiaojun Liu; Wenlong Lu; Liping Zhou
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Paper Abstract

A new optical configuration for amplified off-axis digital holographic microscopy is presented and applied to surface measurement. By symmetrical configurations in the optical path, aberration compensation for phase curvature can be avoided in the reconstructed process. Three dimensional surface texture of a grating plate is reconstructed via a single hologram and its parameters are verified.

Paper Details

Date Published: 31 January 2013
PDF: 5 pages
Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 875928 (31 January 2013); doi: 10.1117/12.2014790
Show Author Affiliations
Wu You, Huazhong Univ. of Science and Technology (China)
Xiaojun Liu, Huazhong Univ. of Science and Technology (China)
Wenlong Lu, Huazhong Univ. of Science and Technology (China)
Liping Zhou, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 8759:
Eighth International Symposium on Precision Engineering Measurement and Instrumentation
Jie Lin, Editor(s)

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