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Proceedings Paper

Reduction of measurement errors with two-channel configuration in the Mueller matrix ellipsometer
Author(s): Weiqi Li; Shiyuan Liu; Chuanwei Zhang; Xiuguo Chen
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Paper Abstract

The random noise and the systematic errors caused by azimuthal errors of the optical elements, i.e., the polarizer, the analyzer, or the compensator, would lead to measurement errors in the Mueller matrix ellipsometer (MME). In this paper, we develop the two-channel MME of the optical configuration PCr1SCr2Wp by replacing the analyzer with a Wollaston prism. In the two-channel MME, two intensity spectra would be acquired simultaneously due to the separation and orthogonal polarization of two light beams by the Wollaston prism and are combined to deduce the Mueller matrix. Two figures of merit are derived to evaluate the effects of random noise and systematic errors on the Mueller matrix measurement, and numerical simulations demonstrate that the two-channel MME can give access to higher accuracy by reducing measurement errors due to random noise and systematic errors.

Paper Details

Date Published: 31 January 2013
PDF: 8 pages
Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 875954 (31 January 2013); doi: 10.1117/12.2014581
Show Author Affiliations
Weiqi Li, Huazhong Univ. of Science and Technology (China)
Shiyuan Liu, Huazhong Univ. of Science and Technology (China)
Chuanwei Zhang, Huazhong Univ. of Science and Technology (China)
Xiuguo Chen, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 8759:
Eighth International Symposium on Precision Engineering Measurement and Instrumentation
Jie Lin, Editor(s)

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