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Proceedings Paper

Suspended Si/air high contrast subwavelength gratings for long-wavelength infrared reflectors
Author(s): Justin M. Foley; Jamie D. Phillips
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Paper Abstract

We report broadband reflectance in the long-wavelength infrared (LWIR, 8-12 μm) utilizing suspended-Si, high-index-contrast subwavelength gratings (HCGs). Iterative design optimization using finite element analysis software has been performed accounting for silicon’s wavelength-dependent index of refraction and extinction coefficient. Grating arrays were fabricated using commercial silicon-on-insulator (SOI) substrates, photolithography and reactive ion etching; subsequent selective wet etching of SiO2 was used to provide suspended Si/air gratings. Fourier transform infrared (FTIR) spectroscopy demonstrates broadband, polarization–dependent reflectance between 8.5 and 12 μm, which agrees with the simulated response.

Paper Details

Date Published: 15 March 2013
PDF: 7 pages
Proc. SPIE 8633, High Contrast Metastructures II, 863310 (15 March 2013); doi: 10.1117/12.2014532
Show Author Affiliations
Justin M. Foley, Univ. of Michigan (United States)
Jamie D. Phillips, Univ. of Michigan (United States)

Published in SPIE Proceedings Vol. 8633:
High Contrast Metastructures II
Connie J. Chang-Hasnain; Fumio Koyama; Alan Eli Willner; Weimin Zhou, Editor(s)

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