Share Email Print
cover

Proceedings Paper

Two methods of pumping for eximer laser pulse-stretching
Author(s): Ekaterina A. Shershunova; Maxim V. Malashin; Sergey I. Moshkunov; Vladimir A. Yamschikov; Vladislav Yu. Khomich
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Stretching of laser pulses allows to improve eximer laser output characteristics and to prolong a laser lifetime. Two methods of laser pumping are proposed in this paper for stretching of laser pulses. Using a special electric circuit in a pumping generator scheme allowed to double a pulse duration for a small ArF-laser. For the first time a pumping mode with periodically damping voltage across a discharge gap was successfully realized for increasing of KrF-laser pulse duration.

Paper Details

Date Published: 15 March 2013
PDF: 8 pages
Proc. SPIE 8770, 17th International School on Quantum Electronics: Laser Physics and Applications, 87700C (15 March 2013); doi: 10.1117/12.2014508
Show Author Affiliations
Ekaterina A. Shershunova, Institute for Electrophysics and Electric Power (Russian Federation)
Maxim V. Malashin, Institute for Electrophysics and Electric Power (Russian Federation)
Sergey I. Moshkunov, Institute for Electrophysics and Electric Power (Russian Federation)
Vladimir A. Yamschikov, Institute for Electrophysics and Electric Power (Russian Federation)
Vladislav Yu. Khomich, Institute for Electrophysics and Electric Power (Russian Federation)


Published in SPIE Proceedings Vol. 8770:
17th International School on Quantum Electronics: Laser Physics and Applications
Tanja N. Dreischuh; Albena T. Daskalova, Editor(s)

© SPIE. Terms of Use
Back to Top