Share Email Print
cover

Proceedings Paper

A high sensitive roll angle interferometer
Author(s): Yanfen Le; Wenmei Hou; Kai Hu; Aisong Ju
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

A roll angle interferometer with high sensitivity is designed in this paper. Two sets of centrosymmetric beams are used to travel through the measurement and reference arms of the roll angle interferometer which contains two specific optical devices: wedge prism assembly and wedge mirror assembly. The optical path change in both arms caused by roll is converted into phase shift which can be measured by interferometer. Because of the adoption of the centrosymmetric measurement structure, the straightness errors, yaw error and pitch error can be avoided and the dead path is minimized, so that the stability and the accuracy of the measurement can be greatly enhanced. The resolution for the roll measurement is about 0.006″ with the measurement range of ±1°.

Paper Details

Date Published: 31 January 2013
PDF: 7 pages
Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 875922 (31 January 2013); doi: 10.1117/12.2014450
Show Author Affiliations
Yanfen Le, Univ. of Shanghai for Science and Technology (China)
Wenmei Hou, Univ. of Shanghai for Science and Technology (China)
Kai Hu, Univ. of Shanghai for Science and Technology (China)
Aisong Ju, Univ. of Shanghai for Science and Technology (China)


Published in SPIE Proceedings Vol. 8759:
Eighth International Symposium on Precision Engineering Measurement and Instrumentation
Jie Lin, Editor(s)

© SPIE. Terms of Use
Back to Top