Share Email Print
cover

Proceedings Paper

Error analysis and method of calibration for linear time grating displacement sensor
Author(s): Zhonghua Gao; Fangyan Zheng; Xihou Chen; Ziran Chen; Donglin Peng
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

A combination method for calibrating the errors of linear time grating displacement sensor is presented. Based on further analysis of time grating, periodic errors, Abbe errors and thermal expansion errors are integrated to obtain error curve for setting up error model, which is adopted to compensate errors using Fourier harmonic analysis and the principle of liner expansion, respectively. Results prove that this method solves the difficult issues about error separation in the linear measurement, and significantly improves the accuracy of linear time grating. Furthermore, this method also solves the issues about continuous automatic sampling with computer, so that the calibration efficiency has been greatly enhanced.

Paper Details

Date Published: 31 January 2013
PDF: 7 pages
Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87594A (31 January 2013); doi: 10.1117/12.2014435
Show Author Affiliations
Zhonghua Gao, Chongqing Univ. of Technology (China)
Hefei Univ. of Technology (China)
Fangyan Zheng, Chongqing Univ. of Technology (China)
Xihou Chen, Chongqing Univ. of Technology (China)
Ziran Chen, Chongqing Univ. of Technology (China)
Donglin Peng, Chongqing Univ. of Technology (China)


Published in SPIE Proceedings Vol. 8759:
Eighth International Symposium on Precision Engineering Measurement and Instrumentation
Jie Lin, Editor(s)

© SPIE. Terms of Use
Back to Top